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Plasma source

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This is an old revision of this page, as edited by 129.101.8.222 (talk) at 20:36, 16 July 2002. The present address (URL) is a permanent link to this revision, which may differ significantly from the current revision.

ICP Inductively Coupled Plasma 

   Solenoid Coil
   Planar Coil
   Helical Resonator

CCP Capacitively Coupled Plasma

Wave Heated Plasma 

   ECR Electron Cyclotron Resonance
   Helicon Discharge.

DC Discharges

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